Replacement Electrode-less LOLLY POP MICROWAVE UV LAMP - designed for use in various systems made by the OEM Axcelis/Fusion.
Examples include the M200 H-MOD system for Photoresist Cure, OEM lamp part number 203669 - LAMP UV MOD H and FUSION M150PC.
We can also provide matching replacements for other OEM lamp part numbers, including 068221, 068224 MODIFIED "D", 068229 LAMP H-MOD, and 054544.
UV LAMP(S) CONTAIN MERCURY AND MUST BE RECYCLED OR DISPOSED OF ACCORDING TO LOCAL, STATE OR FEDERAL LAWS.
This product is no longer in stock